Directing to the structure and dynamic characteristics of a high performance XY-stage driven by linear motors,this paper presented the fault diagnosis method based on wavelet multi-resolution combined with time-domain analysis for the stage.
針對(duì)直線電機(jī)驅(qū)動(dòng)的高性能XY工作臺(tái)的結(jié)構(gòu)及運(yùn)動(dòng)特點(diǎn),提出基于小波多分辨率分析與信號(hào)時(shí)域分析相融合的高性能XY工作臺(tái)故障診斷方法;該方法通過(guò)分析研究高性能工作平臺(tái)多工況多位置的振動(dòng)信號(hào),對(duì)信號(hào)進(jìn)行小波多分辨率分解后不同尺度上的分解系數(shù)模值取平方,進(jìn)行消噪處理,解決了工作臺(tái)振動(dòng)信號(hào)中隨機(jī)噪聲信號(hào)和故障特征信號(hào)混疊不易提取的難題,由獲取的小波系數(shù)模值平方序列結(jié)合時(shí)域分析方法構(gòu)造特征量,提取出故障信號(hào)特征。